6/17/2010	7:42:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2010	7:42:41 AM	Recipe started at 7:42 AM
6/17/2010	7:42:41 AM	H2 valve closed
6/17/2010	7:42:41 AM	BCl3 valve closed
6/17/2010	7:42:41 AM	PH3 valve closed
6/17/2010	7:42:41 AM	SiCl4 pre valve closed
6/17/2010	7:42:41 AM	SiCl4 post valve closed
6/17/2010	7:42:41 AM	Main Vac valve closed
6/17/2010	7:42:41 AM	Bypass valve closed
6/17/2010	7:42:41 AM	Bubbler valve closed
6/17/2010	7:42:41 AM	Helium valve opened
6/17/2010	7:42:41 AM	Helium MFC set to  500.000000
6/17/2010	7:42:41 AM	H2 MFC set to  0.000000
6/17/2010	7:42:41 AM	BCl3 MFC set to  0.000000
6/17/2010	7:42:41 AM	PHl3 MFC set to  0.000000
6/17/2010	7:42:41 AM	SiCl4 MFC set to  0.000000
6/17/2010	7:42:41 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:42:41 AM	Tube furnace set to 0
6/17/2010	7:42:52 AM	Helium valve closed
6/17/2010	7:42:52 AM	H2 valve closed
6/17/2010	7:42:52 AM	BCl3 valve closed
6/17/2010	7:42:52 AM	PH3 valve closed
6/17/2010	7:42:52 AM	SiCl4 pre valve closed
6/17/2010	7:42:52 AM	SiCl4 post valve closed
6/17/2010	7:42:52 AM	Main Vac valve closed
6/17/2010	7:42:52 AM	Bypass valve closed
6/17/2010	7:42:52 AM	Bubbler valve closed
6/17/2010	7:42:52 AM	Helium MFC set to  0.000000
6/17/2010	7:42:52 AM	H2 MFC set to  0.000000
6/17/2010	7:42:52 AM	BCl3 MFC set to  0.000000
6/17/2010	7:42:52 AM	PHl3 MFC set to  0.000000
6/17/2010	7:42:52 AM	SiCl4 MFC set to  0.000000
6/17/2010	7:42:52 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:42:52 AM	Tube furnace set to 0
6/17/2010	7:42:52 AM	Run finished at 7:42 AM
6/17/2010	7:42:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2010	7:53:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	7:53:48 AM	Recipe started at 7:53 AM
6/17/2010	7:53:48 AM	Helium valve closed
6/17/2010	7:53:48 AM	H2 valve closed
6/17/2010	7:53:48 AM	BCl3 valve closed
6/17/2010	7:53:48 AM	PH3 valve closed
6/17/2010	7:53:48 AM	SiCl4 pre valve closed
6/17/2010	7:53:48 AM	SiCl4 post valve closed
6/17/2010	7:53:48 AM	Main Vac valve closed
6/17/2010	7:53:48 AM	Bubbler valve closed
6/17/2010	7:53:48 AM	Bypass valve opened
6/17/2010	7:53:48 AM	Helium MFC set to  0.000000
6/17/2010	7:53:48 AM	H2 MFC set to  0.000000
6/17/2010	7:53:48 AM	BCl3 MFC set to  0.000000
6/17/2010	7:53:48 AM	PHl3 MFC set to  0.000000
6/17/2010	7:53:48 AM	SiCl4 MFC set to  0.000000
6/17/2010	7:53:48 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:53:48 AM	Tube furnace set to 0
6/17/2010	7:54:35 AM	Helium valve closed
6/17/2010	7:54:35 AM	H2 valve closed
6/17/2010	7:54:35 AM	BCl3 valve closed
6/17/2010	7:54:35 AM	PH3 valve closed
6/17/2010	7:54:35 AM	SiCl4 pre valve closed
6/17/2010	7:54:35 AM	SiCl4 post valve closed
6/17/2010	7:54:35 AM	Bubbler valve closed
6/17/2010	7:54:35 AM	Main Vac valve opened
6/17/2010	7:54:35 AM	Bypass valve opened
6/17/2010	7:54:35 AM	Helium MFC set to  0.000000
6/17/2010	7:54:35 AM	H2 MFC set to  0.000000
6/17/2010	7:54:35 AM	BCl3 MFC set to  0.000000
6/17/2010	7:54:35 AM	PHl3 MFC set to  0.000000
6/17/2010	7:54:35 AM	SiCl4 MFC set to  0.000000
6/17/2010	7:54:35 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:54:35 AM	Tube furnace set to 0
6/17/2010	7:54:36 AM	Run finished at 7:54 AM
6/17/2010	7:54:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	7:55:35 AM	Helium MFC set to  100.000000
6/17/2010	7:55:37 AM	Helium valve opened
6/17/2010	8:36:35 AM	Helium valve closed
6/17/2010	8:36:39 AM	Helium MFC set to  0.000000
6/17/2010	9:48:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/17/2010	9:48:56 AM	Recipe started at 9:48 AM
6/17/2010	9:48:56 AM	Helium valve closed
6/17/2010	9:48:56 AM	H2 valve closed
6/17/2010	9:48:56 AM	BCl3 valve closed
6/17/2010	9:48:56 AM	PH3 valve closed
6/17/2010	9:48:56 AM	SiCl4 pre valve closed
6/17/2010	9:48:56 AM	SiCl4 post valve closed
6/17/2010	9:48:56 AM	Main Vac valve closed
6/17/2010	9:48:56 AM	Bypass valve closed
6/17/2010	9:48:56 AM	Bubbler valve closed
6/17/2010	9:48:56 AM	Helium MFC set to  0.000000
6/17/2010	9:48:56 AM	H2 MFC set to  0.000000
6/17/2010	9:48:56 AM	BCl3 MFC set to  0.000000
6/17/2010	9:48:56 AM	PHl3 MFC set to  0.000000
6/17/2010	9:48:56 AM	SiCl4 MFC set to  0.000000
6/17/2010	9:48:56 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	9:48:56 AM	Tube furnace set to 0
6/17/2010	9:48:56 AM	Run finished at 9:48 AM
6/17/2010	9:48:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/17/2010	9:49:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	9:49:07 AM	Recipe started at 9:49 AM
6/17/2010	9:49:07 AM	Helium valve closed
6/17/2010	9:49:07 AM	H2 valve closed
6/17/2010	9:49:07 AM	BCl3 valve closed
6/17/2010	9:49:07 AM	PH3 valve closed
6/17/2010	9:49:07 AM	SiCl4 pre valve closed
6/17/2010	9:49:07 AM	SiCl4 post valve closed
6/17/2010	9:49:07 AM	Main Vac valve closed
6/17/2010	9:49:07 AM	Bubbler valve closed
6/17/2010	9:49:07 AM	Bypass valve opened
6/17/2010	9:49:07 AM	Helium MFC set to  0.000000
6/17/2010	9:49:07 AM	H2 MFC set to  0.000000
6/17/2010	9:49:07 AM	BCl3 MFC set to  0.000000
6/17/2010	9:49:07 AM	PHl3 MFC set to  0.000000
6/17/2010	9:49:07 AM	SiCl4 MFC set to  0.000000
6/17/2010	9:49:07 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	9:49:08 AM	Tube furnace set to 0
6/17/2010	9:49:08 AM	Helium valve closed
6/17/2010	9:49:08 AM	H2 valve closed
6/17/2010	9:49:08 AM	BCl3 valve closed
6/17/2010	9:49:08 AM	PH3 valve closed
6/17/2010	9:49:08 AM	SiCl4 pre valve closed
6/17/2010	9:49:08 AM	SiCl4 post valve closed
6/17/2010	9:49:08 AM	Bubbler valve closed
6/17/2010	9:49:08 AM	Main Vac valve opened
6/17/2010	9:49:08 AM	Bypass valve opened
6/17/2010	9:49:08 AM	Helium MFC set to  0.000000
6/17/2010	9:49:08 AM	H2 MFC set to  0.000000
6/17/2010	9:49:08 AM	BCl3 MFC set to  0.000000
6/17/2010	9:49:08 AM	PHl3 MFC set to  0.000000
6/17/2010	9:49:08 AM	SiCl4 MFC set to  0.000000
6/17/2010	9:49:08 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	9:49:08 AM	Tube furnace set to 0
6/17/2010	9:49:08 AM	Run finished at 9:49 AM
6/17/2010	9:49:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	9:50:07 AM	Recipe started at 9:50 AM
6/17/2010	9:50:07 AM	Helium valve closed
6/17/2010	9:50:07 AM	BCl3 valve closed
6/17/2010	9:50:07 AM	PH3 valve closed
6/17/2010	9:50:07 AM	SiCl4 pre valve closed
6/17/2010	9:50:07 AM	SiCl4 post valve closed
6/17/2010	9:50:07 AM	Main Vac valve closed
6/17/2010	9:50:07 AM	Bypass valve closed
6/17/2010	9:50:07 AM	Bubbler valve closed
6/17/2010	9:50:07 AM	H2 valve opened
6/17/2010	9:50:07 AM	Helium MFC set to  0.000000
6/17/2010	9:50:07 AM	H2 MFC set to  500.000000
6/17/2010	9:50:07 AM	BCl3 MFC set to  0.000000
6/17/2010	9:50:07 AM	PHl3 MFC set to  0.000000
6/17/2010	9:50:07 AM	SiCl4 MFC set to  0.000000
6/17/2010	9:50:07 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	9:50:07 AM	Tube furnace set to 0
6/17/2010	9:51:29 AM	Helium valve closed
6/17/2010	9:51:29 AM	BCl3 valve closed
6/17/2010	9:51:29 AM	PH3 valve closed
6/17/2010	9:51:29 AM	SiCl4 pre valve closed
6/17/2010	9:51:29 AM	SiCl4 post valve closed
6/17/2010	9:51:29 AM	Main Vac valve closed
6/17/2010	9:51:29 AM	Bypass valve closed
6/17/2010	9:51:29 AM	H2 valve opened
6/17/2010	9:51:29 AM	Bubbler valve opened
6/17/2010	9:51:29 AM	Helium MFC set to  0.000000
6/17/2010	9:51:29 AM	H2 MFC set to  500.000000
6/17/2010	9:51:29 AM	BCl3 MFC set to  0.000000
6/17/2010	9:51:29 AM	PHl3 MFC set to  0.000000
6/17/2010	9:51:29 AM	SiCl4 MFC set to  0.000000
6/17/2010	9:51:29 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	9:51:29 AM	Tube furnace set to 1000
6/17/2010	10:11:29 AM	Helium valve closed
6/17/2010	10:11:29 AM	PH3 valve closed
6/17/2010	10:11:29 AM	Main Vac valve closed
6/17/2010	10:11:29 AM	Bypass valve closed
6/17/2010	10:11:29 AM	H2 valve opened
6/17/2010	10:11:29 AM	BCl3 valve opened
6/17/2010	10:11:29 AM	SiCl4 pre valve opened
6/17/2010	10:11:29 AM	SiCl4 post valve opened
6/17/2010	10:11:29 AM	Bubbler valve opened
6/17/2010	10:11:29 AM	Helium MFC set to  0.000000
6/17/2010	10:11:29 AM	H2 MFC set to  500.000000
6/17/2010	10:11:29 AM	BCl3 MFC set to  15.000000
6/17/2010	10:11:29 AM	PHl3 MFC set to  0.000000
6/17/2010	10:11:29 AM	SiCl4 MFC set to  50.000000
6/17/2010	10:11:29 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	10:11:30 AM	Tube furnace set to 1000
6/17/2010	10:26:30 AM	H2 valve closed
6/17/2010	10:26:30 AM	BCl3 valve closed
6/17/2010	10:26:30 AM	PH3 valve closed
6/17/2010	10:26:30 AM	SiCl4 pre valve closed
6/17/2010	10:26:30 AM	SiCl4 post valve closed
6/17/2010	10:26:30 AM	Main Vac valve closed
6/17/2010	10:26:30 AM	Bypass valve closed
6/17/2010	10:26:30 AM	Helium valve opened
6/17/2010	10:26:30 AM	Bubbler valve opened
6/17/2010	10:26:30 AM	Helium MFC set to  500.000000
6/17/2010	10:26:30 AM	H2 MFC set to  0.000000
6/17/2010	10:26:30 AM	BCl3 MFC set to  0.000000
6/17/2010	10:26:30 AM	PHl3 MFC set to  0.000000
6/17/2010	10:26:30 AM	SiCl4 MFC set to  0.000000
6/17/2010	10:26:30 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	10:26:30 AM	Tube furnace set to 0
6/17/2010	10:46:30 AM	Helium valve closed
6/17/2010	10:46:30 AM	H2 valve closed
6/17/2010	10:46:30 AM	BCl3 valve closed
6/17/2010	10:46:30 AM	PH3 valve closed
6/17/2010	10:46:30 AM	SiCl4 pre valve closed
6/17/2010	10:46:30 AM	SiCl4 post valve closed
6/17/2010	10:46:30 AM	Main Vac valve closed
6/17/2010	10:46:30 AM	Bypass valve closed
6/17/2010	10:46:30 AM	Bubbler valve closed
6/17/2010	10:46:30 AM	Helium MFC set to  0.000000
6/17/2010	10:46:30 AM	H2 MFC set to  0.000000
6/17/2010	10:46:30 AM	BCl3 MFC set to  0.000000
6/17/2010	10:46:30 AM	PHl3 MFC set to  0.000000
6/17/2010	10:46:30 AM	SiCl4 MFC set to  0.000000
6/17/2010	10:46:30 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	10:46:30 AM	Tube furnace set to 0
6/17/2010	10:46:30 AM	Run finished at 10:46 AM
6/17/2010	10:58:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	10:58:27 AM	Recipe started at 10:58 AM
6/17/2010	10:58:27 AM	Helium valve closed
6/17/2010	10:58:27 AM	H2 valve closed
6/17/2010	10:58:27 AM	BCl3 valve closed
6/17/2010	10:58:27 AM	PH3 valve closed
6/17/2010	10:58:27 AM	SiCl4 pre valve closed
6/17/2010	10:58:27 AM	SiCl4 post valve closed
6/17/2010	10:58:27 AM	Main Vac valve closed
6/17/2010	10:58:27 AM	Bubbler valve closed
6/17/2010	10:58:27 AM	Bypass valve opened
6/17/2010	10:58:27 AM	Helium MFC set to  0.000000
6/17/2010	10:58:27 AM	H2 MFC set to  0.000000
6/17/2010	10:58:27 AM	BCl3 MFC set to  0.000000
6/17/2010	10:58:27 AM	PHl3 MFC set to  0.000000
6/17/2010	10:58:27 AM	SiCl4 MFC set to  0.000000
6/17/2010	10:58:27 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	10:58:27 AM	Tube furnace set to 0
6/17/2010	10:59:13 AM	Helium valve closed
6/17/2010	10:59:13 AM	H2 valve closed
6/17/2010	10:59:13 AM	BCl3 valve closed
6/17/2010	10:59:13 AM	PH3 valve closed
6/17/2010	10:59:13 AM	SiCl4 pre valve closed
6/17/2010	10:59:13 AM	SiCl4 post valve closed
6/17/2010	10:59:13 AM	Bubbler valve closed
6/17/2010	10:59:13 AM	Main Vac valve opened
6/17/2010	10:59:13 AM	Bypass valve opened
6/17/2010	10:59:13 AM	Helium MFC set to  0.000000
6/17/2010	10:59:13 AM	H2 MFC set to  0.000000
6/17/2010	10:59:13 AM	BCl3 MFC set to  0.000000
6/17/2010	10:59:13 AM	PHl3 MFC set to  0.000000
6/17/2010	10:59:13 AM	SiCl4 MFC set to  0.000000
6/17/2010	10:59:13 AM	Bypass solenoid MFC set to  0.000000
6/17/2010	10:59:13 AM	Tube furnace set to 0
6/17/2010	10:59:14 AM	Run finished at 10:59 AM
6/17/2010	10:59:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	1:11:15 PM	Program exited cleanly
6/17/2010	1:11:35 PM	Program started normally
6/17/2010	1:11:35 PM	Helium valve closed
6/17/2010	1:11:35 PM	H2 valve closed
6/17/2010	1:11:35 PM	BCl3 valve closed
6/17/2010	1:11:35 PM	PH3 valve closed
6/17/2010	1:11:35 PM	SiCl4 pre valve closed
6/17/2010	1:11:35 PM	SiCl4 post valve closed
6/17/2010	1:11:35 PM	Main Vac valve closed
6/17/2010	1:11:35 PM	Bypass valve closed
6/17/2010	1:11:35 PM	Bubbler valve closed
6/17/2010	1:11:35 PM	Helium MFC set to  0.000000
6/17/2010	1:11:35 PM	H2 MFC set to  0.000000
6/17/2010	1:11:35 PM	BCl3 MFC set to  0.000000
6/17/2010	1:11:35 PM	PHl3 MFC set to  0.000000
6/17/2010	1:11:35 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:11:35 PM	Bypass solenoid MFC set to  760.000000
6/17/2010	1:11:35 PM	Tube furnace set to 0
6/17/2010	1:11:41 PM	Bypass valve opened
6/17/2010	1:11:42 PM	Main Vac valve opened
6/17/2010	1:11:49 PM	Bypass valve closed
6/17/2010	1:11:52 PM	Bypass valve opened
6/17/2010	1:11:54 PM	Bypass valve closed
6/17/2010	1:11:59 PM	Bypass valve opened
6/17/2010	1:12:00 PM	Bypass valve closed
6/17/2010	1:12:02 PM	Bypass valve opened
6/17/2010	1:12:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2010	1:12:57 PM	Recipe started at 1:12 PM
6/17/2010	1:12:57 PM	H2 valve closed
6/17/2010	1:12:57 PM	BCl3 valve closed
6/17/2010	1:12:57 PM	PH3 valve closed
6/17/2010	1:12:57 PM	SiCl4 pre valve closed
6/17/2010	1:12:57 PM	SiCl4 post valve closed
6/17/2010	1:12:57 PM	Main Vac valve closed
6/17/2010	1:12:57 PM	Bypass valve closed
6/17/2010	1:12:57 PM	Bubbler valve closed
6/17/2010	1:12:57 PM	Helium valve opened
6/17/2010	1:12:57 PM	Helium MFC set to  500.000000
6/17/2010	1:12:57 PM	H2 MFC set to  0.000000
6/17/2010	1:12:57 PM	BCl3 MFC set to  0.000000
6/17/2010	1:12:57 PM	PHl3 MFC set to  0.000000
6/17/2010	1:12:57 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:12:57 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:12:57 PM	Tube furnace set to 0
6/17/2010	1:14:14 PM	Helium valve closed
6/17/2010	1:14:14 PM	H2 valve closed
6/17/2010	1:14:14 PM	BCl3 valve closed
6/17/2010	1:14:14 PM	PH3 valve closed
6/17/2010	1:14:14 PM	SiCl4 pre valve closed
6/17/2010	1:14:14 PM	SiCl4 post valve closed
6/17/2010	1:14:14 PM	Main Vac valve closed
6/17/2010	1:14:14 PM	Bypass valve closed
6/17/2010	1:14:14 PM	Bubbler valve closed
6/17/2010	1:14:14 PM	Helium MFC set to  0.000000
6/17/2010	1:14:14 PM	H2 MFC set to  0.000000
6/17/2010	1:14:14 PM	BCl3 MFC set to  0.000000
6/17/2010	1:14:14 PM	PHl3 MFC set to  0.000000
6/17/2010	1:14:14 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:14:14 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:14:14 PM	Tube furnace set to 0
6/17/2010	1:14:14 PM	Run finished at 1:14 PM
6/17/2010	1:14:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2010	1:36:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	1:36:46 PM	Recipe started at 1:36 PM
6/17/2010	1:36:46 PM	Helium valve closed
6/17/2010	1:36:46 PM	H2 valve closed
6/17/2010	1:36:46 PM	BCl3 valve closed
6/17/2010	1:36:46 PM	PH3 valve closed
6/17/2010	1:36:46 PM	SiCl4 pre valve closed
6/17/2010	1:36:46 PM	SiCl4 post valve closed
6/17/2010	1:36:46 PM	Main Vac valve closed
6/17/2010	1:36:46 PM	Bubbler valve closed
6/17/2010	1:36:46 PM	Bypass valve opened
6/17/2010	1:36:46 PM	Helium MFC set to  0.000000
6/17/2010	1:36:46 PM	H2 MFC set to  0.000000
6/17/2010	1:36:46 PM	BCl3 MFC set to  0.000000
6/17/2010	1:36:46 PM	PHl3 MFC set to  0.000000
6/17/2010	1:36:46 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:36:46 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:36:46 PM	Tube furnace set to 0
6/17/2010	1:37:34 PM	Helium valve closed
6/17/2010	1:37:34 PM	H2 valve closed
6/17/2010	1:37:34 PM	BCl3 valve closed
6/17/2010	1:37:34 PM	PH3 valve closed
6/17/2010	1:37:34 PM	SiCl4 pre valve closed
6/17/2010	1:37:34 PM	SiCl4 post valve closed
6/17/2010	1:37:34 PM	Bubbler valve closed
6/17/2010	1:37:34 PM	Main Vac valve opened
6/17/2010	1:37:34 PM	Bypass valve opened
6/17/2010	1:37:34 PM	Helium MFC set to  0.000000
6/17/2010	1:37:34 PM	H2 MFC set to  0.000000
6/17/2010	1:37:34 PM	BCl3 MFC set to  0.000000
6/17/2010	1:37:34 PM	PHl3 MFC set to  0.000000
6/17/2010	1:37:34 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:37:34 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:37:34 PM	Tube furnace set to 0
6/17/2010	1:37:34 PM	Run finished at 1:37 PM
6/17/2010	1:37:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	1:40:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/17/2010	1:40:38 PM	Recipe started at 1:40 PM
6/17/2010	1:40:38 PM	H2 valve closed
6/17/2010	1:40:38 PM	BCl3 valve closed
6/17/2010	1:40:38 PM	PH3 valve closed
6/17/2010	1:40:38 PM	SiCl4 pre valve closed
6/17/2010	1:40:38 PM	SiCl4 post valve closed
6/17/2010	1:40:38 PM	Main Vac valve closed
6/17/2010	1:40:38 PM	Bypass valve closed
6/17/2010	1:40:38 PM	Bubbler valve closed
6/17/2010	1:40:38 PM	Helium valve opened
6/17/2010	1:40:38 PM	Helium MFC set to  500.000000
6/17/2010	1:40:38 PM	H2 MFC set to  0.000000
6/17/2010	1:40:38 PM	BCl3 MFC set to  0.000000
6/17/2010	1:40:38 PM	PHl3 MFC set to  0.000000
6/17/2010	1:40:38 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:40:38 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:40:38 PM	Tube furnace set to 0
6/17/2010	1:41:59 PM	Helium valve closed
6/17/2010	1:41:59 PM	H2 valve closed
6/17/2010	1:41:59 PM	BCl3 valve closed
6/17/2010	1:41:59 PM	PH3 valve closed
6/17/2010	1:41:59 PM	SiCl4 pre valve closed
6/17/2010	1:41:59 PM	SiCl4 post valve closed
6/17/2010	1:41:59 PM	Main Vac valve closed
6/17/2010	1:41:59 PM	Bypass valve closed
6/17/2010	1:41:59 PM	Bubbler valve closed
6/17/2010	1:41:59 PM	Helium MFC set to  0.000000
6/17/2010	1:41:59 PM	H2 MFC set to  0.000000
6/17/2010	1:41:59 PM	BCl3 MFC set to  0.000000
6/17/2010	1:41:59 PM	PHl3 MFC set to  0.000000
6/17/2010	1:41:59 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:41:59 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:41:59 PM	Tube furnace set to 0
6/17/2010	1:42:14 PM	Helium valve closed
6/17/2010	1:42:14 PM	H2 valve closed
6/17/2010	1:42:14 PM	BCl3 valve closed
6/17/2010	1:42:14 PM	PH3 valve closed
6/17/2010	1:42:14 PM	SiCl4 pre valve closed
6/17/2010	1:42:14 PM	SiCl4 post valve closed
6/17/2010	1:42:14 PM	Main Vac valve closed
6/17/2010	1:42:14 PM	Bubbler valve closed
6/17/2010	1:42:14 PM	Bypass valve opened
6/17/2010	1:42:14 PM	Helium MFC set to  0.000000
6/17/2010	1:42:14 PM	H2 MFC set to  0.000000
6/17/2010	1:42:14 PM	BCl3 MFC set to  0.000000
6/17/2010	1:42:14 PM	PHl3 MFC set to  0.000000
6/17/2010	1:42:14 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:42:14 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:42:14 PM	Tube furnace set to 0
6/17/2010	1:42:48 PM	Helium valve closed
6/17/2010	1:42:48 PM	H2 valve closed
6/17/2010	1:42:48 PM	BCl3 valve closed
6/17/2010	1:42:48 PM	PH3 valve closed
6/17/2010	1:42:48 PM	SiCl4 pre valve closed
6/17/2010	1:42:48 PM	SiCl4 post valve closed
6/17/2010	1:42:48 PM	Bubbler valve closed
6/17/2010	1:42:48 PM	Main Vac valve opened
6/17/2010	1:42:48 PM	Bypass valve opened
6/17/2010	1:42:48 PM	Helium MFC set to  0.000000
6/17/2010	1:42:48 PM	H2 MFC set to  0.000000
6/17/2010	1:42:48 PM	BCl3 MFC set to  0.000000
6/17/2010	1:42:48 PM	PHl3 MFC set to  0.000000
6/17/2010	1:42:48 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:42:48 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:42:48 PM	Tube furnace set to 0
6/17/2010	1:47:48 PM	H2 valve closed
6/17/2010	1:47:48 PM	BCl3 valve closed
6/17/2010	1:47:48 PM	PH3 valve closed
6/17/2010	1:47:48 PM	SiCl4 pre valve closed
6/17/2010	1:47:48 PM	SiCl4 post valve closed
6/17/2010	1:47:48 PM	Main Vac valve closed
6/17/2010	1:47:48 PM	Bypass valve closed
6/17/2010	1:47:48 PM	Bubbler valve closed
6/17/2010	1:47:48 PM	Helium valve opened
6/17/2010	1:47:48 PM	Helium MFC set to  500.000000
6/17/2010	1:47:48 PM	H2 MFC set to  0.000000
6/17/2010	1:47:48 PM	BCl3 MFC set to  0.000000
6/17/2010	1:47:48 PM	PHl3 MFC set to  0.000000
6/17/2010	1:47:48 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:47:48 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:47:49 PM	Tube furnace set to 0
6/17/2010	1:49:10 PM	Helium valve closed
6/17/2010	1:49:10 PM	H2 valve closed
6/17/2010	1:49:10 PM	BCl3 valve closed
6/17/2010	1:49:10 PM	PH3 valve closed
6/17/2010	1:49:10 PM	SiCl4 pre valve closed
6/17/2010	1:49:10 PM	SiCl4 post valve closed
6/17/2010	1:49:10 PM	Main Vac valve closed
6/17/2010	1:49:10 PM	Bypass valve closed
6/17/2010	1:49:10 PM	Bubbler valve closed
6/17/2010	1:49:10 PM	Helium MFC set to  0.000000
6/17/2010	1:49:10 PM	H2 MFC set to  0.000000
6/17/2010	1:49:10 PM	BCl3 MFC set to  0.000000
6/17/2010	1:49:10 PM	PHl3 MFC set to  0.000000
6/17/2010	1:49:10 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:49:10 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:49:10 PM	Tube furnace set to 0
6/17/2010	1:49:25 PM	Helium valve closed
6/17/2010	1:49:25 PM	H2 valve closed
6/17/2010	1:49:25 PM	BCl3 valve closed
6/17/2010	1:49:25 PM	PH3 valve closed
6/17/2010	1:49:25 PM	SiCl4 pre valve closed
6/17/2010	1:49:25 PM	SiCl4 post valve closed
6/17/2010	1:49:25 PM	Main Vac valve closed
6/17/2010	1:49:25 PM	Bubbler valve closed
6/17/2010	1:49:25 PM	Bypass valve opened
6/17/2010	1:49:25 PM	Helium MFC set to  0.000000
6/17/2010	1:49:25 PM	H2 MFC set to  0.000000
6/17/2010	1:49:25 PM	BCl3 MFC set to  0.000000
6/17/2010	1:49:25 PM	PHl3 MFC set to  0.000000
6/17/2010	1:49:25 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:49:25 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:49:25 PM	Tube furnace set to 0
6/17/2010	1:49:59 PM	Helium valve closed
6/17/2010	1:49:59 PM	H2 valve closed
6/17/2010	1:49:59 PM	BCl3 valve closed
6/17/2010	1:49:59 PM	PH3 valve closed
6/17/2010	1:49:59 PM	SiCl4 pre valve closed
6/17/2010	1:49:59 PM	SiCl4 post valve closed
6/17/2010	1:49:59 PM	Bubbler valve closed
6/17/2010	1:49:59 PM	Main Vac valve opened
6/17/2010	1:49:59 PM	Bypass valve opened
6/17/2010	1:49:59 PM	Helium MFC set to  0.000000
6/17/2010	1:49:59 PM	H2 MFC set to  0.000000
6/17/2010	1:49:59 PM	BCl3 MFC set to  0.000000
6/17/2010	1:49:59 PM	PHl3 MFC set to  0.000000
6/17/2010	1:49:59 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:49:59 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:49:59 PM	Tube furnace set to 0
6/17/2010	1:54:59 PM	H2 valve closed
6/17/2010	1:54:59 PM	BCl3 valve closed
6/17/2010	1:54:59 PM	PH3 valve closed
6/17/2010	1:54:59 PM	SiCl4 pre valve closed
6/17/2010	1:54:59 PM	SiCl4 post valve closed
6/17/2010	1:54:59 PM	Main Vac valve closed
6/17/2010	1:54:59 PM	Bypass valve closed
6/17/2010	1:54:59 PM	Bubbler valve closed
6/17/2010	1:54:59 PM	Helium valve opened
6/17/2010	1:54:59 PM	Helium MFC set to  500.000000
6/17/2010	1:54:59 PM	H2 MFC set to  0.000000
6/17/2010	1:54:59 PM	BCl3 MFC set to  0.000000
6/17/2010	1:54:59 PM	PHl3 MFC set to  0.000000
6/17/2010	1:54:59 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:54:59 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:54:59 PM	Tube furnace set to 0
6/17/2010	1:56:20 PM	Helium valve closed
6/17/2010	1:56:20 PM	H2 valve closed
6/17/2010	1:56:20 PM	BCl3 valve closed
6/17/2010	1:56:20 PM	PH3 valve closed
6/17/2010	1:56:20 PM	SiCl4 pre valve closed
6/17/2010	1:56:20 PM	SiCl4 post valve closed
6/17/2010	1:56:20 PM	Main Vac valve closed
6/17/2010	1:56:20 PM	Bypass valve closed
6/17/2010	1:56:20 PM	Bubbler valve closed
6/17/2010	1:56:20 PM	Helium MFC set to  0.000000
6/17/2010	1:56:20 PM	H2 MFC set to  0.000000
6/17/2010	1:56:20 PM	BCl3 MFC set to  0.000000
6/17/2010	1:56:20 PM	PHl3 MFC set to  0.000000
6/17/2010	1:56:20 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:56:20 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:56:20 PM	Tube furnace set to 0
6/17/2010	1:56:35 PM	Helium valve closed
6/17/2010	1:56:35 PM	H2 valve closed
6/17/2010	1:56:35 PM	BCl3 valve closed
6/17/2010	1:56:35 PM	PH3 valve closed
6/17/2010	1:56:35 PM	SiCl4 pre valve closed
6/17/2010	1:56:35 PM	SiCl4 post valve closed
6/17/2010	1:56:35 PM	Main Vac valve closed
6/17/2010	1:56:35 PM	Bubbler valve closed
6/17/2010	1:56:36 PM	Bypass valve opened
6/17/2010	1:56:36 PM	Helium MFC set to  0.000000
6/17/2010	1:56:36 PM	H2 MFC set to  0.000000
6/17/2010	1:56:36 PM	BCl3 MFC set to  0.000000
6/17/2010	1:56:36 PM	PHl3 MFC set to  0.000000
6/17/2010	1:56:36 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:56:36 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:56:36 PM	Tube furnace set to 0
6/17/2010	1:57:09 PM	Helium valve closed
6/17/2010	1:57:09 PM	H2 valve closed
6/17/2010	1:57:09 PM	BCl3 valve closed
6/17/2010	1:57:09 PM	PH3 valve closed
6/17/2010	1:57:09 PM	SiCl4 pre valve closed
6/17/2010	1:57:09 PM	SiCl4 post valve closed
6/17/2010	1:57:09 PM	Bubbler valve closed
6/17/2010	1:57:09 PM	Main Vac valve opened
6/17/2010	1:57:09 PM	Bypass valve opened
6/17/2010	1:57:09 PM	Helium MFC set to  0.000000
6/17/2010	1:57:09 PM	H2 MFC set to  0.000000
6/17/2010	1:57:09 PM	BCl3 MFC set to  0.000000
6/17/2010	1:57:09 PM	PHl3 MFC set to  0.000000
6/17/2010	1:57:09 PM	SiCl4 MFC set to  0.000000
6/17/2010	1:57:09 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	1:57:09 PM	Tube furnace set to 0
6/17/2010	2:02:09 PM	Helium valve closed
6/17/2010	2:02:09 PM	H2 valve closed
6/17/2010	2:02:09 PM	BCl3 valve closed
6/17/2010	2:02:09 PM	PH3 valve closed
6/17/2010	2:02:09 PM	SiCl4 pre valve closed
6/17/2010	2:02:09 PM	SiCl4 post valve closed
6/17/2010	2:02:09 PM	Bubbler valve closed
6/17/2010	2:02:09 PM	Main Vac valve opened
6/17/2010	2:02:09 PM	Bypass valve opened
6/17/2010	2:02:09 PM	Helium MFC set to  0.000000
6/17/2010	2:02:09 PM	H2 MFC set to  0.000000
6/17/2010	2:02:09 PM	BCl3 MFC set to  0.000000
6/17/2010	2:02:09 PM	PHl3 MFC set to  0.000000
6/17/2010	2:02:09 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:02:09 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:02:10 PM	Tube furnace set to 0
6/17/2010	2:02:11 PM	Run finished at 2:02 PM
6/17/2010	2:02:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/17/2010	2:04:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/17/2010	2:04:38 PM	Recipe started at 2:04 PM
6/17/2010	2:04:38 PM	H2 valve closed
6/17/2010	2:04:38 PM	BCl3 valve closed
6/17/2010	2:04:38 PM	PH3 valve closed
6/17/2010	2:04:38 PM	SiCl4 pre valve closed
6/17/2010	2:04:38 PM	SiCl4 post valve closed
6/17/2010	2:04:38 PM	Main Vac valve closed
6/17/2010	2:04:38 PM	Bypass valve closed
6/17/2010	2:04:38 PM	Bubbler valve closed
6/17/2010	2:04:38 PM	Helium valve opened
6/17/2010	2:04:38 PM	Helium MFC set to  500.000000
6/17/2010	2:04:38 PM	H2 MFC set to  0.000000
6/17/2010	2:04:38 PM	BCl3 MFC set to  0.000000
6/17/2010	2:04:38 PM	PHl3 MFC set to  0.000000
6/17/2010	2:04:38 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:04:38 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:04:38 PM	Tube furnace set to 0
6/17/2010	2:05:59 PM	Helium valve closed
6/17/2010	2:05:59 PM	H2 valve closed
6/17/2010	2:05:59 PM	BCl3 valve closed
6/17/2010	2:05:59 PM	PH3 valve closed
6/17/2010	2:05:59 PM	SiCl4 pre valve closed
6/17/2010	2:05:59 PM	SiCl4 post valve closed
6/17/2010	2:05:59 PM	Main Vac valve closed
6/17/2010	2:05:59 PM	Bypass valve closed
6/17/2010	2:05:59 PM	Bubbler valve closed
6/17/2010	2:05:59 PM	Helium MFC set to  0.000000
6/17/2010	2:05:59 PM	H2 MFC set to  0.000000
6/17/2010	2:05:59 PM	BCl3 MFC set to  0.000000
6/17/2010	2:05:59 PM	PHl3 MFC set to  0.000000
6/17/2010	2:05:59 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:05:59 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:05:59 PM	Tube furnace set to 0
6/17/2010	2:06:14 PM	Helium valve closed
6/17/2010	2:06:14 PM	H2 valve closed
6/17/2010	2:06:14 PM	BCl3 valve closed
6/17/2010	2:06:14 PM	PH3 valve closed
6/17/2010	2:06:14 PM	SiCl4 pre valve closed
6/17/2010	2:06:14 PM	SiCl4 post valve closed
6/17/2010	2:06:14 PM	Main Vac valve closed
6/17/2010	2:06:14 PM	Bubbler valve closed
6/17/2010	2:06:14 PM	Bypass valve opened
6/17/2010	2:06:14 PM	Helium MFC set to  0.000000
6/17/2010	2:06:14 PM	H2 MFC set to  0.000000
6/17/2010	2:06:14 PM	BCl3 MFC set to  0.000000
6/17/2010	2:06:14 PM	PHl3 MFC set to  0.000000
6/17/2010	2:06:14 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:06:14 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:06:15 PM	Tube furnace set to 0
6/17/2010	2:06:48 PM	Helium valve closed
6/17/2010	2:06:48 PM	H2 valve closed
6/17/2010	2:06:48 PM	BCl3 valve closed
6/17/2010	2:06:48 PM	PH3 valve closed
6/17/2010	2:06:48 PM	SiCl4 pre valve closed
6/17/2010	2:06:48 PM	SiCl4 post valve closed
6/17/2010	2:06:48 PM	Bubbler valve closed
6/17/2010	2:06:48 PM	Main Vac valve opened
6/17/2010	2:06:48 PM	Bypass valve opened
6/17/2010	2:06:48 PM	Helium MFC set to  0.000000
6/17/2010	2:06:48 PM	H2 MFC set to  0.000000
6/17/2010	2:06:48 PM	BCl3 MFC set to  0.000000
6/17/2010	2:06:48 PM	PHl3 MFC set to  0.000000
6/17/2010	2:06:48 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:06:48 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:06:48 PM	Tube furnace set to 0
6/17/2010	2:07:26 PM	Run aborted at 2:07 PM
6/17/2010	2:07:26 PM	Helium valve closed
6/17/2010	2:07:26 PM	H2 valve closed
6/17/2010	2:07:26 PM	BCl3 valve closed
6/17/2010	2:07:27 PM	PH3 valve closed
6/17/2010	2:07:27 PM	SiCl4 pre valve closed
6/17/2010	2:07:27 PM	SiCl4 post valve closed
6/17/2010	2:07:27 PM	Bypass valve closed
6/17/2010	2:07:27 PM	Main Vac valve closed
6/17/2010	2:07:27 PM	Bubbler valve closed
6/17/2010	2:07:27 PM	Helium MFC set to  0.000000
6/17/2010	2:07:27 PM	H2 MFC set to  0.000000
6/17/2010	2:07:27 PM	BCl3 MFC set to  0.000000
6/17/2010	2:07:27 PM	PHl3 MFC set to  0.000000
6/17/2010	2:07:27 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:07:27 PM	Tube furnace set to 0
6/17/2010	2:07:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/17/2010	2:07:34 PM	Helium MFC set to  100.000000
6/17/2010	2:07:35 PM	Helium valve opened
6/17/2010	2:07:37 PM	Bypass valve closed
6/17/2010	2:07:37 PM	Main Vac valve closed
6/17/2010	2:07:40 PM	Helium valve closed
6/17/2010	2:07:42 PM	Main Vac valve opened
6/17/2010	2:07:43 PM	Bypass valve opened
6/17/2010	2:07:44 PM	Helium valve opened
6/17/2010	2:18:29 PM	Helium valve closed
6/17/2010	2:18:31 PM	Helium MFC set to  0.000000
6/17/2010	2:20:03 PM	Bypass valve closed
6/17/2010	2:20:03 PM	Main Vac valve closed
6/17/2010	2:21:25 PM	Bypass valve opened
6/17/2010	2:21:25 PM	Main Vac valve opened
6/17/2010	2:21:57 PM	Recipe started at 2:21 PM
6/17/2010	2:21:57 PM	Helium valve closed
6/17/2010	2:21:57 PM	BCl3 valve closed
6/17/2010	2:21:57 PM	PH3 valve closed
6/17/2010	2:21:57 PM	SiCl4 pre valve closed
6/17/2010	2:21:57 PM	SiCl4 post valve closed
6/17/2010	2:21:57 PM	Main Vac valve closed
6/17/2010	2:21:57 PM	Bypass valve closed
6/17/2010	2:21:57 PM	Bubbler valve closed
6/17/2010	2:21:57 PM	H2 valve opened
6/17/2010	2:21:57 PM	Helium MFC set to  0.000000
6/17/2010	2:21:57 PM	H2 MFC set to  500.000000
6/17/2010	2:21:57 PM	BCl3 MFC set to  0.000000
6/17/2010	2:21:57 PM	PHl3 MFC set to  0.000000
6/17/2010	2:21:57 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:21:57 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:21:57 PM	Tube furnace set to 0
6/17/2010	2:23:18 PM	Helium valve closed
6/17/2010	2:23:18 PM	BCl3 valve closed
6/17/2010	2:23:18 PM	PH3 valve closed
6/17/2010	2:23:18 PM	SiCl4 pre valve closed
6/17/2010	2:23:18 PM	SiCl4 post valve closed
6/17/2010	2:23:18 PM	Main Vac valve closed
6/17/2010	2:23:18 PM	Bypass valve closed
6/17/2010	2:23:18 PM	H2 valve opened
6/17/2010	2:23:18 PM	Bubbler valve opened
6/17/2010	2:23:18 PM	Helium MFC set to  0.000000
6/17/2010	2:23:18 PM	H2 MFC set to  500.000000
6/17/2010	2:23:18 PM	BCl3 MFC set to  0.000000
6/17/2010	2:23:18 PM	PHl3 MFC set to  0.000000
6/17/2010	2:23:18 PM	SiCl4 MFC set to  0.000000
6/17/2010	2:23:18 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:23:18 PM	Tube furnace set to 1000
6/17/2010	2:43:18 PM	Helium valve closed
6/17/2010	2:43:18 PM	PH3 valve closed
6/17/2010	2:43:18 PM	Main Vac valve closed
6/17/2010	2:43:18 PM	Bypass valve closed
6/17/2010	2:43:18 PM	H2 valve opened
6/17/2010	2:43:18 PM	BCl3 valve opened
6/17/2010	2:43:18 PM	SiCl4 pre valve opened
6/17/2010	2:43:18 PM	SiCl4 post valve opened
6/17/2010	2:43:18 PM	Bubbler valve opened
6/17/2010	2:43:18 PM	Helium MFC set to  0.000000
6/17/2010	2:43:18 PM	H2 MFC set to  500.000000
6/17/2010	2:43:18 PM	BCl3 MFC set to  35.000000
6/17/2010	2:43:18 PM	PHl3 MFC set to  0.000000
6/17/2010	2:43:18 PM	SiCl4 MFC set to  50.000000
6/17/2010	2:43:18 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	2:43:19 PM	Tube furnace set to 1000
6/17/2010	3:03:19 PM	H2 valve closed
6/17/2010	3:03:19 PM	BCl3 valve closed
6/17/2010	3:03:19 PM	PH3 valve closed
6/17/2010	3:03:19 PM	SiCl4 pre valve closed
6/17/2010	3:03:19 PM	SiCl4 post valve closed
6/17/2010	3:03:19 PM	Main Vac valve closed
6/17/2010	3:03:19 PM	Bypass valve closed
6/17/2010	3:03:19 PM	Helium valve opened
6/17/2010	3:03:19 PM	Bubbler valve opened
6/17/2010	3:03:19 PM	Helium MFC set to  500.000000
6/17/2010	3:03:19 PM	H2 MFC set to  0.000000
6/17/2010	3:03:19 PM	BCl3 MFC set to  0.000000
6/17/2010	3:03:19 PM	PHl3 MFC set to  0.000000
6/17/2010	3:03:19 PM	SiCl4 MFC set to  0.000000
6/17/2010	3:03:19 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	3:03:19 PM	Tube furnace set to 0
6/17/2010	3:23:19 PM	Helium valve closed
6/17/2010	3:23:19 PM	H2 valve closed
6/17/2010	3:23:19 PM	BCl3 valve closed
6/17/2010	3:23:19 PM	PH3 valve closed
6/17/2010	3:23:19 PM	SiCl4 pre valve closed
6/17/2010	3:23:19 PM	SiCl4 post valve closed
6/17/2010	3:23:19 PM	Main Vac valve closed
6/17/2010	3:23:19 PM	Bypass valve closed
6/17/2010	3:23:19 PM	Bubbler valve closed
6/17/2010	3:23:19 PM	Helium MFC set to  0.000000
6/17/2010	3:23:19 PM	H2 MFC set to  0.000000
6/17/2010	3:23:19 PM	BCl3 MFC set to  0.000000
6/17/2010	3:23:19 PM	PHl3 MFC set to  0.000000
6/17/2010	3:23:19 PM	SiCl4 MFC set to  0.000000
6/17/2010	3:23:19 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	3:23:19 PM	Tube furnace set to 0
6/17/2010	3:23:19 PM	Run finished at 3:23 PM
6/17/2010	3:27:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	3:27:45 PM	Recipe started at 3:27 PM
6/17/2010	3:27:45 PM	Helium valve closed
6/17/2010	3:27:45 PM	H2 valve closed
6/17/2010	3:27:45 PM	BCl3 valve closed
6/17/2010	3:27:45 PM	PH3 valve closed
6/17/2010	3:27:45 PM	SiCl4 pre valve closed
6/17/2010	3:27:45 PM	SiCl4 post valve closed
6/17/2010	3:27:45 PM	Main Vac valve closed
6/17/2010	3:27:45 PM	Bubbler valve closed
6/17/2010	3:27:45 PM	Bypass valve opened
6/17/2010	3:27:45 PM	Helium MFC set to  0.000000
6/17/2010	3:27:45 PM	H2 MFC set to  0.000000
6/17/2010	3:27:45 PM	BCl3 MFC set to  0.000000
6/17/2010	3:27:45 PM	PHl3 MFC set to  0.000000
6/17/2010	3:27:45 PM	SiCl4 MFC set to  0.000000
6/17/2010	3:27:45 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	3:27:45 PM	Tube furnace set to 0
6/17/2010	3:28:31 PM	Helium valve closed
6/17/2010	3:28:31 PM	H2 valve closed
6/17/2010	3:28:31 PM	BCl3 valve closed
6/17/2010	3:28:31 PM	PH3 valve closed
6/17/2010	3:28:31 PM	SiCl4 pre valve closed
6/17/2010	3:28:31 PM	SiCl4 post valve closed
6/17/2010	3:28:31 PM	Bubbler valve closed
6/17/2010	3:28:31 PM	Main Vac valve opened
6/17/2010	3:28:31 PM	Bypass valve opened
6/17/2010	3:28:31 PM	Helium MFC set to  0.000000
6/17/2010	3:28:31 PM	H2 MFC set to  0.000000
6/17/2010	3:28:31 PM	BCl3 MFC set to  0.000000
6/17/2010	3:28:31 PM	PHl3 MFC set to  0.000000
6/17/2010	3:28:31 PM	SiCl4 MFC set to  0.000000
6/17/2010	3:28:31 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	3:28:32 PM	Tube furnace set to 0
6/17/2010	3:28:32 PM	Run finished at 3:28 PM
6/17/2010	3:28:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	6:24:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2010	6:24:57 PM	Recipe started at 6:24 PM
6/17/2010	6:24:57 PM	H2 valve closed
6/17/2010	6:24:57 PM	BCl3 valve closed
6/17/2010	6:24:57 PM	PH3 valve closed
6/17/2010	6:24:57 PM	SiCl4 pre valve closed
6/17/2010	6:24:57 PM	SiCl4 post valve closed
6/17/2010	6:24:57 PM	Main Vac valve closed
6/17/2010	6:24:57 PM	Bypass valve closed
6/17/2010	6:24:57 PM	Bubbler valve closed
6/17/2010	6:24:57 PM	Helium valve opened
6/17/2010	6:24:57 PM	Helium MFC set to  500.000000
6/17/2010	6:24:57 PM	H2 MFC set to  0.000000
6/17/2010	6:24:57 PM	BCl3 MFC set to  0.000000
6/17/2010	6:24:57 PM	PHl3 MFC set to  0.000000
6/17/2010	6:24:57 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:24:57 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:24:58 PM	Tube furnace set to 0
6/17/2010	6:26:16 PM	Helium valve closed
6/17/2010	6:26:16 PM	H2 valve closed
6/17/2010	6:26:16 PM	BCl3 valve closed
6/17/2010	6:26:16 PM	PH3 valve closed
6/17/2010	6:26:16 PM	SiCl4 pre valve closed
6/17/2010	6:26:16 PM	SiCl4 post valve closed
6/17/2010	6:26:16 PM	Main Vac valve closed
6/17/2010	6:26:16 PM	Bypass valve closed
6/17/2010	6:26:16 PM	Bubbler valve closed
6/17/2010	6:26:16 PM	Helium MFC set to  0.000000
6/17/2010	6:26:16 PM	H2 MFC set to  0.000000
6/17/2010	6:26:16 PM	BCl3 MFC set to  0.000000
6/17/2010	6:26:16 PM	PHl3 MFC set to  0.000000
6/17/2010	6:26:16 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:26:16 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:26:16 PM	Tube furnace set to 0
6/17/2010	6:26:16 PM	Run finished at 6:26 PM
6/17/2010	6:26:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2010	6:28:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	6:28:40 PM	Recipe started at 6:28 PM
6/17/2010	6:28:40 PM	Helium valve closed
6/17/2010	6:28:40 PM	H2 valve closed
6/17/2010	6:28:40 PM	BCl3 valve closed
6/17/2010	6:28:40 PM	PH3 valve closed
6/17/2010	6:28:40 PM	SiCl4 pre valve closed
6/17/2010	6:28:40 PM	SiCl4 post valve closed
6/17/2010	6:28:40 PM	Main Vac valve closed
6/17/2010	6:28:40 PM	Bubbler valve closed
6/17/2010	6:28:40 PM	Bypass valve opened
6/17/2010	6:28:40 PM	Helium MFC set to  0.000000
6/17/2010	6:28:40 PM	H2 MFC set to  0.000000
6/17/2010	6:28:40 PM	BCl3 MFC set to  0.000000
6/17/2010	6:28:40 PM	PHl3 MFC set to  0.000000
6/17/2010	6:28:40 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:28:40 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:28:40 PM	Tube furnace set to 0
6/17/2010	6:29:26 PM	Helium valve closed
6/17/2010	6:29:26 PM	H2 valve closed
6/17/2010	6:29:26 PM	BCl3 valve closed
6/17/2010	6:29:26 PM	PH3 valve closed
6/17/2010	6:29:26 PM	SiCl4 pre valve closed
6/17/2010	6:29:26 PM	SiCl4 post valve closed
6/17/2010	6:29:26 PM	Bubbler valve closed
6/17/2010	6:29:26 PM	Main Vac valve opened
6/17/2010	6:29:26 PM	Bypass valve opened
6/17/2010	6:29:26 PM	Helium MFC set to  0.000000
6/17/2010	6:29:26 PM	H2 MFC set to  0.000000
6/17/2010	6:29:26 PM	BCl3 MFC set to  0.000000
6/17/2010	6:29:26 PM	PHl3 MFC set to  0.000000
6/17/2010	6:29:26 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:29:26 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:29:26 PM	Tube furnace set to 0
6/17/2010	6:29:26 PM	Run finished at 6:29 PM
6/17/2010	6:29:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	6:42:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/17/2010	6:42:15 PM	Recipe started at 6:42 PM
6/17/2010	6:42:15 PM	H2 valve closed
6/17/2010	6:42:15 PM	BCl3 valve closed
6/17/2010	6:42:15 PM	PH3 valve closed
6/17/2010	6:42:15 PM	SiCl4 pre valve closed
6/17/2010	6:42:15 PM	SiCl4 post valve closed
6/17/2010	6:42:15 PM	Main Vac valve closed
6/17/2010	6:42:15 PM	Bypass valve closed
6/17/2010	6:42:15 PM	Bubbler valve closed
6/17/2010	6:42:15 PM	Helium valve opened
6/17/2010	6:42:15 PM	Helium MFC set to  500.000000
6/17/2010	6:42:15 PM	H2 MFC set to  0.000000
6/17/2010	6:42:15 PM	BCl3 MFC set to  0.000000
6/17/2010	6:42:15 PM	PHl3 MFC set to  0.000000
6/17/2010	6:42:15 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:42:15 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:42:15 PM	Tube furnace set to 0
6/17/2010	6:43:36 PM	Helium valve closed
6/17/2010	6:43:36 PM	H2 valve closed
6/17/2010	6:43:36 PM	BCl3 valve closed
6/17/2010	6:43:36 PM	PH3 valve closed
6/17/2010	6:43:36 PM	SiCl4 pre valve closed
6/17/2010	6:43:36 PM	SiCl4 post valve closed
6/17/2010	6:43:36 PM	Main Vac valve closed
6/17/2010	6:43:36 PM	Bypass valve closed
6/17/2010	6:43:36 PM	Bubbler valve closed
6/17/2010	6:43:36 PM	Helium MFC set to  0.000000
6/17/2010	6:43:36 PM	H2 MFC set to  0.000000
6/17/2010	6:43:36 PM	BCl3 MFC set to  0.000000
6/17/2010	6:43:36 PM	PHl3 MFC set to  0.000000
6/17/2010	6:43:36 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:43:36 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:43:36 PM	Tube furnace set to 0
6/17/2010	6:43:51 PM	Helium valve closed
6/17/2010	6:43:51 PM	H2 valve closed
6/17/2010	6:43:51 PM	BCl3 valve closed
6/17/2010	6:43:51 PM	PH3 valve closed
6/17/2010	6:43:51 PM	SiCl4 pre valve closed
6/17/2010	6:43:51 PM	SiCl4 post valve closed
6/17/2010	6:43:51 PM	Main Vac valve closed
6/17/2010	6:43:51 PM	Bubbler valve closed
6/17/2010	6:43:51 PM	Bypass valve opened
6/17/2010	6:43:51 PM	Helium MFC set to  0.000000
6/17/2010	6:43:51 PM	H2 MFC set to  0.000000
6/17/2010	6:43:51 PM	BCl3 MFC set to  0.000000
6/17/2010	6:43:51 PM	PHl3 MFC set to  0.000000
6/17/2010	6:43:51 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:43:51 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:43:51 PM	Tube furnace set to 0
6/17/2010	6:44:25 PM	Helium valve closed
6/17/2010	6:44:25 PM	H2 valve closed
6/17/2010	6:44:25 PM	BCl3 valve closed
6/17/2010	6:44:25 PM	PH3 valve closed
6/17/2010	6:44:25 PM	SiCl4 pre valve closed
6/17/2010	6:44:25 PM	SiCl4 post valve closed
6/17/2010	6:44:25 PM	Bubbler valve closed
6/17/2010	6:44:25 PM	Main Vac valve opened
6/17/2010	6:44:25 PM	Bypass valve opened
6/17/2010	6:44:25 PM	Helium MFC set to  0.000000
6/17/2010	6:44:25 PM	H2 MFC set to  0.000000
6/17/2010	6:44:25 PM	BCl3 MFC set to  0.000000
6/17/2010	6:44:25 PM	PHl3 MFC set to  0.000000
6/17/2010	6:44:25 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:44:25 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:44:25 PM	Tube furnace set to 0
6/17/2010	6:49:25 PM	H2 valve closed
6/17/2010	6:49:25 PM	BCl3 valve closed
6/17/2010	6:49:25 PM	PH3 valve closed
6/17/2010	6:49:25 PM	SiCl4 pre valve closed
6/17/2010	6:49:25 PM	SiCl4 post valve closed
6/17/2010	6:49:25 PM	Main Vac valve closed
6/17/2010	6:49:25 PM	Bypass valve closed
6/17/2010	6:49:25 PM	Bubbler valve closed
6/17/2010	6:49:25 PM	Helium valve opened
6/17/2010	6:49:25 PM	Helium MFC set to  500.000000
6/17/2010	6:49:25 PM	H2 MFC set to  0.000000
6/17/2010	6:49:25 PM	BCl3 MFC set to  0.000000
6/17/2010	6:49:25 PM	PHl3 MFC set to  0.000000
6/17/2010	6:49:25 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:49:25 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:49:25 PM	Tube furnace set to 0
6/17/2010	6:50:45 PM	Helium valve closed
6/17/2010	6:50:45 PM	H2 valve closed
6/17/2010	6:50:45 PM	BCl3 valve closed
6/17/2010	6:50:45 PM	PH3 valve closed
6/17/2010	6:50:45 PM	SiCl4 pre valve closed
6/17/2010	6:50:45 PM	SiCl4 post valve closed
6/17/2010	6:50:45 PM	Main Vac valve closed
6/17/2010	6:50:45 PM	Bypass valve closed
6/17/2010	6:50:45 PM	Bubbler valve closed
6/17/2010	6:50:45 PM	Helium MFC set to  0.000000
6/17/2010	6:50:45 PM	H2 MFC set to  0.000000
6/17/2010	6:50:45 PM	BCl3 MFC set to  0.000000
6/17/2010	6:50:45 PM	PHl3 MFC set to  0.000000
6/17/2010	6:50:45 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:50:45 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:50:46 PM	Tube furnace set to 0
6/17/2010	6:51:01 PM	Helium valve closed
6/17/2010	6:51:01 PM	H2 valve closed
6/17/2010	6:51:01 PM	BCl3 valve closed
6/17/2010	6:51:01 PM	PH3 valve closed
6/17/2010	6:51:01 PM	SiCl4 pre valve closed
6/17/2010	6:51:01 PM	SiCl4 post valve closed
6/17/2010	6:51:01 PM	Main Vac valve closed
6/17/2010	6:51:01 PM	Bubbler valve closed
6/17/2010	6:51:01 PM	Bypass valve opened
6/17/2010	6:51:01 PM	Helium MFC set to  0.000000
6/17/2010	6:51:01 PM	H2 MFC set to  0.000000
6/17/2010	6:51:01 PM	BCl3 MFC set to  0.000000
6/17/2010	6:51:01 PM	PHl3 MFC set to  0.000000
6/17/2010	6:51:01 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:51:01 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:51:01 PM	Tube furnace set to 0
6/17/2010	6:51:34 PM	Helium valve closed
6/17/2010	6:51:34 PM	H2 valve closed
6/17/2010	6:51:34 PM	BCl3 valve closed
6/17/2010	6:51:34 PM	PH3 valve closed
6/17/2010	6:51:34 PM	SiCl4 pre valve closed
6/17/2010	6:51:34 PM	SiCl4 post valve closed
6/17/2010	6:51:34 PM	Bubbler valve closed
6/17/2010	6:51:34 PM	Main Vac valve opened
6/17/2010	6:51:34 PM	Bypass valve opened
6/17/2010	6:51:34 PM	Helium MFC set to  0.000000
6/17/2010	6:51:34 PM	H2 MFC set to  0.000000
6/17/2010	6:51:34 PM	BCl3 MFC set to  0.000000
6/17/2010	6:51:34 PM	PHl3 MFC set to  0.000000
6/17/2010	6:51:34 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:51:34 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:51:34 PM	Tube furnace set to 0
6/17/2010	6:56:34 PM	H2 valve closed
6/17/2010	6:56:34 PM	BCl3 valve closed
6/17/2010	6:56:34 PM	PH3 valve closed
6/17/2010	6:56:34 PM	SiCl4 pre valve closed
6/17/2010	6:56:34 PM	SiCl4 post valve closed
6/17/2010	6:56:34 PM	Main Vac valve closed
6/17/2010	6:56:34 PM	Bypass valve closed
6/17/2010	6:56:34 PM	Bubbler valve closed
6/17/2010	6:56:34 PM	Helium valve opened
6/17/2010	6:56:34 PM	Helium MFC set to  500.000000
6/17/2010	6:56:34 PM	H2 MFC set to  0.000000
6/17/2010	6:56:34 PM	BCl3 MFC set to  0.000000
6/17/2010	6:56:34 PM	PHl3 MFC set to  0.000000
6/17/2010	6:56:34 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:56:34 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:56:34 PM	Tube furnace set to 0
6/17/2010	6:57:55 PM	Helium valve closed
6/17/2010	6:57:55 PM	H2 valve closed
6/17/2010	6:57:55 PM	BCl3 valve closed
6/17/2010	6:57:55 PM	PH3 valve closed
6/17/2010	6:57:55 PM	SiCl4 pre valve closed
6/17/2010	6:57:55 PM	SiCl4 post valve closed
6/17/2010	6:57:55 PM	Main Vac valve closed
6/17/2010	6:57:55 PM	Bypass valve closed
6/17/2010	6:57:55 PM	Bubbler valve closed
6/17/2010	6:57:55 PM	Helium MFC set to  0.000000
6/17/2010	6:57:55 PM	H2 MFC set to  0.000000
6/17/2010	6:57:55 PM	BCl3 MFC set to  0.000000
6/17/2010	6:57:55 PM	PHl3 MFC set to  0.000000
6/17/2010	6:57:55 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:57:55 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:57:55 PM	Tube furnace set to 0
6/17/2010	6:58:10 PM	Helium valve closed
6/17/2010	6:58:10 PM	H2 valve closed
6/17/2010	6:58:10 PM	BCl3 valve closed
6/17/2010	6:58:10 PM	PH3 valve closed
6/17/2010	6:58:10 PM	SiCl4 pre valve closed
6/17/2010	6:58:10 PM	SiCl4 post valve closed
6/17/2010	6:58:10 PM	Main Vac valve closed
6/17/2010	6:58:10 PM	Bubbler valve closed
6/17/2010	6:58:10 PM	Bypass valve opened
6/17/2010	6:58:10 PM	Helium MFC set to  0.000000
6/17/2010	6:58:10 PM	H2 MFC set to  0.000000
6/17/2010	6:58:10 PM	BCl3 MFC set to  0.000000
6/17/2010	6:58:10 PM	PHl3 MFC set to  0.000000
6/17/2010	6:58:10 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:58:10 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:58:10 PM	Tube furnace set to 0
6/17/2010	6:58:44 PM	Helium valve closed
6/17/2010	6:58:44 PM	H2 valve closed
6/17/2010	6:58:44 PM	BCl3 valve closed
6/17/2010	6:58:44 PM	PH3 valve closed
6/17/2010	6:58:44 PM	SiCl4 pre valve closed
6/17/2010	6:58:44 PM	SiCl4 post valve closed
6/17/2010	6:58:44 PM	Bubbler valve closed
6/17/2010	6:58:44 PM	Main Vac valve opened
6/17/2010	6:58:44 PM	Bypass valve opened
6/17/2010	6:58:44 PM	Helium MFC set to  0.000000
6/17/2010	6:58:44 PM	H2 MFC set to  0.000000
6/17/2010	6:58:44 PM	BCl3 MFC set to  0.000000
6/17/2010	6:58:44 PM	PHl3 MFC set to  0.000000
6/17/2010	6:58:44 PM	SiCl4 MFC set to  0.000000
6/17/2010	6:58:44 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	6:58:44 PM	Tube furnace set to 0
6/17/2010	7:03:44 PM	Helium valve closed
6/17/2010	7:03:44 PM	H2 valve closed
6/17/2010	7:03:44 PM	BCl3 valve closed
6/17/2010	7:03:44 PM	PH3 valve closed
6/17/2010	7:03:44 PM	SiCl4 pre valve closed
6/17/2010	7:03:44 PM	SiCl4 post valve closed
6/17/2010	7:03:44 PM	Bubbler valve closed
6/17/2010	7:03:44 PM	Main Vac valve opened
6/17/2010	7:03:44 PM	Bypass valve opened
6/17/2010	7:03:44 PM	Helium MFC set to  0.000000
6/17/2010	7:03:44 PM	H2 MFC set to  0.000000
6/17/2010	7:03:44 PM	BCl3 MFC set to  0.000000
6/17/2010	7:03:44 PM	PHl3 MFC set to  0.000000
6/17/2010	7:03:44 PM	SiCl4 MFC set to  0.000000
6/17/2010	7:03:44 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:03:44 PM	Tube furnace set to 0
6/17/2010	7:03:45 PM	Run finished at 7:03 PM
6/17/2010	7:03:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/17/2010	7:20:42 PM	Bypass valve closed
6/17/2010	7:20:43 PM	Main Vac valve closed
6/17/2010	7:20:51 PM	Main Vac valve opened
6/17/2010	7:20:52 PM	Bypass valve opened
6/17/2010	7:21:54 PM	Recipe started at 7:21 PM
6/17/2010	7:21:54 PM	Helium valve closed
6/17/2010	7:21:54 PM	BCl3 valve closed
6/17/2010	7:21:54 PM	PH3 valve closed
6/17/2010	7:21:54 PM	SiCl4 pre valve closed
6/17/2010	7:21:54 PM	SiCl4 post valve closed
6/17/2010	7:21:54 PM	Main Vac valve closed
6/17/2010	7:21:54 PM	Bypass valve closed
6/17/2010	7:21:54 PM	Bubbler valve closed
6/17/2010	7:21:54 PM	H2 valve opened
6/17/2010	7:21:54 PM	Helium MFC set to  0.000000
6/17/2010	7:21:54 PM	H2 MFC set to  500.000000
6/17/2010	7:21:54 PM	BCl3 MFC set to  0.000000
6/17/2010	7:21:54 PM	PHl3 MFC set to  0.000000
6/17/2010	7:21:54 PM	SiCl4 MFC set to  0.000000
6/17/2010	7:21:54 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:21:55 PM	Tube furnace set to 0
6/17/2010	7:23:17 PM	Helium valve closed
6/17/2010	7:23:17 PM	BCl3 valve closed
6/17/2010	7:23:17 PM	PH3 valve closed
6/17/2010	7:23:17 PM	SiCl4 pre valve closed
6/17/2010	7:23:17 PM	SiCl4 post valve closed
6/17/2010	7:23:17 PM	Main Vac valve closed
6/17/2010	7:23:17 PM	Bypass valve closed
6/17/2010	7:23:17 PM	H2 valve opened
6/17/2010	7:23:17 PM	Bubbler valve opened
6/17/2010	7:23:17 PM	Helium MFC set to  0.000000
6/17/2010	7:23:17 PM	H2 MFC set to  500.000000
6/17/2010	7:23:17 PM	BCl3 MFC set to  0.000000
6/17/2010	7:23:17 PM	PHl3 MFC set to  0.000000
6/17/2010	7:23:17 PM	SiCl4 MFC set to  0.000000
6/17/2010	7:23:17 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:23:17 PM	Tube furnace set to 1000
6/17/2010	7:32:42 PM	Helium valve closed
6/17/2010	7:32:42 PM	PH3 valve closed
6/17/2010	7:32:42 PM	Main Vac valve closed
6/17/2010	7:32:42 PM	Bypass valve closed
6/17/2010	7:32:42 PM	H2 valve opened
6/17/2010	7:32:42 PM	BCl3 valve opened
6/17/2010	7:32:42 PM	SiCl4 pre valve opened
6/17/2010	7:32:42 PM	SiCl4 post valve opened
6/17/2010	7:32:42 PM	Bubbler valve opened
6/17/2010	7:32:42 PM	Helium MFC set to  0.000000
6/17/2010	7:32:42 PM	H2 MFC set to  500.000000
6/17/2010	7:32:42 PM	BCl3 MFC set to  35.000000
6/17/2010	7:32:42 PM	PHl3 MFC set to  0.000000
6/17/2010	7:32:42 PM	SiCl4 MFC set to  50.000000
6/17/2010	7:32:42 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:32:42 PM	Tube furnace set to 1000
6/17/2010	7:36:03 PM	Helium valve closed
6/17/2010	7:36:03 PM	PH3 valve closed
6/17/2010	7:36:03 PM	Main Vac valve closed
6/17/2010	7:36:03 PM	Bypass valve closed
6/17/2010	7:36:03 PM	H2 valve opened
6/17/2010	7:36:03 PM	BCl3 valve opened
6/17/2010	7:36:03 PM	SiCl4 pre valve opened
6/17/2010	7:36:03 PM	SiCl4 post valve opened
6/17/2010	7:36:03 PM	Bubbler valve opened
6/17/2010	7:36:03 PM	Helium MFC set to  0.000000
6/17/2010	7:36:03 PM	H2 MFC set to  500.000000
6/17/2010	7:36:03 PM	BCl3 MFC set to  35.000000
6/17/2010	7:36:03 PM	PHl3 MFC set to  0.000000
6/17/2010	7:36:03 PM	SiCl4 MFC set to  50.000000
6/17/2010	7:36:03 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:36:03 PM	Tube furnace set to 1000
6/17/2010	7:41:03 PM	H2 valve closed
6/17/2010	7:41:03 PM	BCl3 valve closed
6/17/2010	7:41:03 PM	PH3 valve closed
6/17/2010	7:41:03 PM	SiCl4 pre valve closed
6/17/2010	7:41:03 PM	SiCl4 post valve closed
6/17/2010	7:41:03 PM	Main Vac valve closed
6/17/2010	7:41:03 PM	Bypass valve closed
6/17/2010	7:41:03 PM	Helium valve opened
6/17/2010	7:41:03 PM	Bubbler valve opened
6/17/2010	7:41:03 PM	Helium MFC set to  500.000000
6/17/2010	7:41:03 PM	H2 MFC set to  0.000000
6/17/2010	7:41:03 PM	BCl3 MFC set to  0.000000
6/17/2010	7:41:03 PM	PHl3 MFC set to  0.000000
6/17/2010	7:41:03 PM	SiCl4 MFC set to  0.000000
6/17/2010	7:41:03 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	7:41:03 PM	Tube furnace set to 0
6/17/2010	8:01:03 PM	Helium valve closed
6/17/2010	8:01:03 PM	H2 valve closed
6/17/2010	8:01:03 PM	BCl3 valve closed
6/17/2010	8:01:03 PM	PH3 valve closed
6/17/2010	8:01:03 PM	SiCl4 pre valve closed
6/17/2010	8:01:03 PM	SiCl4 post valve closed
6/17/2010	8:01:03 PM	Main Vac valve closed
6/17/2010	8:01:03 PM	Bypass valve closed
6/17/2010	8:01:03 PM	Bubbler valve closed
6/17/2010	8:01:03 PM	Helium MFC set to  0.000000
6/17/2010	8:01:03 PM	H2 MFC set to  0.000000
6/17/2010	8:01:03 PM	BCl3 MFC set to  0.000000
6/17/2010	8:01:03 PM	PHl3 MFC set to  0.000000
6/17/2010	8:01:03 PM	SiCl4 MFC set to  0.000000
6/17/2010	8:01:03 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	8:01:03 PM	Tube furnace set to 0
6/17/2010	8:01:03 PM	Run finished at 8:01 PM
6/17/2010	8:08:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2010	8:08:24 PM	Recipe started at 8:08 PM
6/17/2010	8:08:24 PM	Helium valve closed
6/17/2010	8:08:24 PM	H2 valve closed
6/17/2010	8:08:24 PM	BCl3 valve closed
6/17/2010	8:08:24 PM	PH3 valve closed
6/17/2010	8:08:24 PM	SiCl4 pre valve closed
6/17/2010	8:08:24 PM	SiCl4 post valve closed
6/17/2010	8:08:24 PM	Main Vac valve closed
6/17/2010	8:08:24 PM	Bubbler valve closed
6/17/2010	8:08:24 PM	Bypass valve opened
6/17/2010	8:08:24 PM	Helium MFC set to  0.000000
6/17/2010	8:08:24 PM	H2 MFC set to  0.000000
6/17/2010	8:08:24 PM	BCl3 MFC set to  0.000000
6/17/2010	8:08:24 PM	PHl3 MFC set to  0.000000
6/17/2010	8:08:24 PM	SiCl4 MFC set to  0.000000
6/17/2010	8:08:24 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	8:08:24 PM	Tube furnace set to 0
6/17/2010	8:09:10 PM	Helium valve closed
6/17/2010	8:09:10 PM	H2 valve closed
6/17/2010	8:09:10 PM	BCl3 valve closed
6/17/2010	8:09:10 PM	PH3 valve closed
6/17/2010	8:09:10 PM	SiCl4 pre valve closed
6/17/2010	8:09:10 PM	SiCl4 post valve closed
6/17/2010	8:09:10 PM	Bubbler valve closed
6/17/2010	8:09:10 PM	Main Vac valve opened
6/17/2010	8:09:10 PM	Bypass valve opened
6/17/2010	8:09:10 PM	Helium MFC set to  0.000000
6/17/2010	8:09:10 PM	H2 MFC set to  0.000000
6/17/2010	8:09:10 PM	BCl3 MFC set to  0.000000
6/17/2010	8:09:10 PM	PHl3 MFC set to  0.000000
6/17/2010	8:09:10 PM	SiCl4 MFC set to  0.000000
6/17/2010	8:09:10 PM	Bypass solenoid MFC set to  0.000000
6/17/2010	8:09:10 PM	Tube furnace set to 0
6/17/2010	8:09:11 PM	Run finished at 8:09 PM
6/17/2010	8:09:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
